发明名称 |
METHOD FOR CREATING A RESONATOR |
摘要 |
The present invention concerns a method for manufacturing a resonator in a substrate characterized in that it includes the following steps:
a) modifying the structure of at least one region of the substrate in order to make said at least one region more selective;b) etching said at least one region in order to selectively manufacture said resonator. |
申请公布号 |
US2015036346(A1) |
申请公布日期 |
2015.02.05 |
申请号 |
US201214367803 |
申请日期 |
2012.12.20 |
申请人 |
The Swatch Group Research and Development Ltd |
发明人 |
Hessler Thierry;Dalla Piazza Silvio |
分类号 |
H03H9/19;H01L41/332;H03H9/215;F21V17/02;H01L41/047 |
主分类号 |
H03H9/19 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Marin CH |