发明名称 METHOD FOR CREATING A RESONATOR
摘要 The present invention concerns a method for manufacturing a resonator in a substrate characterized in that it includes the following steps: a) modifying the structure of at least one region of the substrate in order to make said at least one region more selective;b) etching said at least one region in order to selectively manufacture said resonator.
申请公布号 US2015036346(A1) 申请公布日期 2015.02.05
申请号 US201214367803 申请日期 2012.12.20
申请人 The Swatch Group Research and Development Ltd 发明人 Hessler Thierry;Dalla Piazza Silvio
分类号 H03H9/19;H01L41/332;H03H9/215;F21V17/02;H01L41/047 主分类号 H03H9/19
代理机构 代理人
主权项
地址 Marin CH
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