| 摘要 |
PROBLEM TO BE SOLVED: To make it possible, in an optical modulator for performing optical modulation by applying stress to an optical active element formed on a beam structure by displacing the beam structure, for the stress to efficiently concentrate on the optical active element.SOLUTION: A movable structural body 104 is provided with multiple through holes 141, and the multiple through holes 141 are arranged in such a state as to be disposed at grid points of a grid which has any one of a regular triangle, a regular tetragon, and a regular hexagon as a shape of a basic grid. The through holes 141 are served as holes through which an etchant (hydrofluoric acid) used in processing a support layer 102 with selective etching to a movable part forming layer 103 is made to enter a layer underlying the movable part forming layer 103 (the movable structural body 104). |
