| 摘要 |
PROBLEM TO BE SOLVED: To provide a device which can implement suitable processing even in a case where, with a femtosecond laser only, processing is impossible or insufficient.SOLUTION: A carbonic acid gas laser is emitted while superimposing on a femtosecond laser. With irradiation of a carbonic acid gas laser, molecular bond cutting by a femtosecond laser becomes to be easily generated. Therefore, even in a case where processing is impossible with a femtosecond laser only, processing becomes possible with combination of a carbonic acid gas laser. In addition, a focusing position of a femtosecond laser is made deep by a thermal lens effect of a carbonic acid gas laser and the processing depth can be changed correspondingly to output of a carbonic acid gas laser. |
