FIB-SEM ARRAY TOMOGRAPHY

摘要

Methods and devices for magnified imaging of three-dimensional samples are disclosed. The methods include imaging sample sections of a sample section series using a first particle-optical device. Coordinates of the imaged sample point are acquired and stored in such a way that the coordinates of the imaged sample point can be associated with the respective image of this sample point. The method also includes selecting a volume of interest (VOI), and transmitting the coordinates of the selected VOI to a second particle-optical device. In addition, the method includes imaging the selected VOI by means of the second particle-optical device. A plurality of planes of a sample section are imaged in order to obtain a 3D image of the selected VOI.

主权项

1. A method, comprising:
using a first particle-optical device to image sample sections of a series of sample sections, coordinates of an imaged point of the sample being acquired and stored so that the coordinates of the imaged point of the sample are associated with the image of the point of the sample; selecting a volume of interest of the sample (VOI); transmitting the coordinates of the selected VOI to a second particle-optical device; and using the second particle-optical device to image the selected VOI, wherein the method comprises imaging a plurality of planes of a sample section to obtain a 3D image of the selected VOI.