发明名称 EVENT PROCESSING BASED SYSTEM FOR MANUFACTURING YIELD IMPROVEMENT
摘要 <p>An event processing system identifies a process event associated with an identified defect in a manufacturing process. The event processing system selects a plurality of data elements from a manufacturing data source based on the process event. The manufacturing data source is associated with the manufacturing process during execution of the manufacturing process. During execution of the manufacturing process, the event processing system applies an event rule to the plurality of data elements to determine whether the event rule is satisfied. During execution of the manufacturing process, the event processing system performs a predefined action upon determining that the event rule is satisfied and selects additional data elements from the manufacturing data source upon determining that the event rule is not satisfied.</p>
申请公布号 WO2015017577(A1) 申请公布日期 2015.02.05
申请号 WO2014US48960 申请日期 2014.07.30
申请人 APPLIED MATERIALS, INC. 发明人 SAMANTARAY, JAMINI;SCOVILLE, JOHN
分类号 G05B19/418;H01L21/00 主分类号 G05B19/418
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