SURFACE OBSERVATION SAMPLE COOLING DEVICE AND SURFACE OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface observation sample cooling device and a surface observation device in which its environment can be cooled down to a value lower than 7.2K in ultra high vacuum of 10Torr or less, various kinds of beam are irradiated onto the surface of a sample from outside the device, reflected beams or discharged beams from the surface described above can be measured and replacement of the sample can be carried out without breaking vacuum condition.SOLUTION: Some problems described in the above theme can be resolved under application of the surface observation sample cooling device comprising: a cylindrical heat shield; a heat transfer rod arranged in the cylindrical heat shield; a high heat conductive electric insulation plate; a sample holder pressed by a sample holder pressing plate against the high heat conductive electric insulation plate; an opening or closing part arranged at the cylindrical heat shield; and two beam holes arranged at the opening or closing part.