| 发明名称 |
METHOD OF MONITORING A LASER BEAM AND LASER IRRADIATION APPARATUS USING THE SAME |
| 摘要 |
A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system. |
| 申请公布号 |
US2015034614(A1) |
申请公布日期 |
2015.02.05 |
| 申请号 |
US201414170350 |
申请日期 |
2014.01.31 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
KIM Joon-Hyung;LEE Hae-Sook;KIM Sung-Gon;JEONG IL-Young;HAN Gyoo-Wan;RYU Je-Kil;CHO Kyoung-Seok |
| 分类号 |
H01L21/66;B23K26/03;B23K26/00 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser irradiation apparatus comprising:
a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system. |
| 地址 |
Yongin-City KR |
