摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical element array in which cells are integrated in high density.SOLUTION: A semiconductor optical element array includes a substrate 100, a plurality of lower part electrode layers 102 including a conductive semiconductor of high conductivity that is grown on the substrate 100, being patterned in stripe along one direction, a plurality of semiconductor optical elements C disposed side by side on respective lower part electrode layers 102, containing an active layer 103, and an upper part electrode layer 401 which is patterned in the direction across the lower part electrode layer 102, connecting the plurality of semiconductor optical elements C arrayed in the stripe direction, and has an opening part H so as to expose a part of the upper surface. |