| 摘要 |
The invention relates to a method for loading a blank made of quartz glass with hydrogen, wherein the loading comprises two steps. In the first step, the blank is loaded at a first temperature (T1) and a first hydrogen partial pressure (p1), and in the second step the blank is loaded at a second temperature (T2) that is different from the first temperature, and a second hydrogen partial pressure (p2) that is different from the first hydrogen partial pressure, wherein the first and the second temperature (&Tgr;1, T2) is lower than a threshold temperature (TL), at which a thermal formation of silane in the quartz glass of the blank sets in. The invention further relates to a lens element produced from such a blank, and to a projection object lens having at least one such lens element. |
