发明名称 SHOWER PLATE HOLDING TOOL
摘要 <p>PROBLEM TO BE SOLVED: To provide a holding tool capable of restraining a local force when holding a shower plate.SOLUTION: A holding tool comprises: an absorption part for contacting and absorbing a surface of a shower plate, a grip part for an operator to grip; a sheet-like member arranged in a recess on a side of the absorption part contacting the shower plate, and absorbed onto the surface of the shower plate; and a protrusion part projecting from the sheet-like member, and blocking a through hole arranged on the shower plate while the absorption part is in contact with the surface of the shower plate. Pressure in a space between the sheet-like member, the protrusion part and the surface of the shower plate is reduced, so as to generate an absorption force between the absorption part and the shower plate.</p>
申请公布号 JP2015025497(A) 申请公布日期 2015.02.05
申请号 JP20130155139 申请日期 2013.07.26
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 TANIMURA HIDENORI
分类号 F16B47/00;B25J15/06;C23C16/44;H01L21/3065 主分类号 F16B47/00
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