发明名称 METAL-INSULATOR-METAL DIODES AND METHODS OF FABRICATION
摘要 Provided herein are embodiments relating to metal-insulator-metal diodes and their method of manufacture. In some embodiments, the metal-insulator-metal diodes can be made, in part, via the use of an evanescent wave on a photo resist. In some embodiments, this allows for finer manipulation of the photo resist and allows for the separation of one piece of metal into a first and second piece of metal. The first piece of metal can then be differentially treated from the second (for example, by annealing another metal to the first piece), to allow for a difference in the work function of the two pieces of metal.
申请公布号 WO2015016861(A2) 申请公布日期 2015.02.05
申请号 WO2013US52868 申请日期 2013.07.31
申请人 EMPIRE TECHNOLOGY DEVELOPMENT LLC 发明人 SEIKE, AYA
分类号 H01L29/861 主分类号 H01L29/861
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