| 摘要 |
<p>Provided is a support body separation method for separating a laminated body (1) formed by laminating the following in this order: a substrate (11); an adhesive layer (14); a separation layer (16) that transforms by absorbing light; and a support plate (12). The method includes a radiation step for radiating pulsed laser light to the separation layer (16). With respect to each pulse of the laser light, the laser light is scanned so that the irradiated regions on the separation layer (16) do not overlap each other.</p> |
