| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sliding member that has an amorphous carbon film formed thereon and obtains a lower friction coefficient than that of conventional ones, and to provide a method for manufacturing the same. <P>SOLUTION: The sliding member includes the amorphous carbon film containing silicon and nitrogen and formed on a sliding surface of a substrate. The amorphous carbon film on the sliding member has the atom ratio of silicon atom content/carbon atom content of≥0.1, and the atom ration (N/C ratio) of nitrogen atom content/carbon atom content of within a range of 0.1-0.25. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
