摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microactuator having high resonance frequency; and a small-sized and inexpensive magnetic head or magnetic disc inspection device using the microactuator, and having high head positioning accuracy or large displacement generation amount. <P>SOLUTION: A microactuator includes: a fixed portion 1; at least one linear driving element 2 attached to the fixed portion; hinges 4b and 4a provided on the fixed portion on right and left sides across a center line in an expanding/contracting direction of the linear driving element on a tip end side of the linear driving element; two beams 42b and 42a respectively provided with the hinges 4b and 4a; a head fixing portion 5 to/from which a head 12 can be attached/detached, and provided on tip end sides of the two beams; and an additional hinge 41 provided between a predetermined position provided between at least one of the two beams and the head fixing portion, which includes those too, and the fixed portion. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |