发明名称 基材上にニオブドープチタニアフィルムを蒸着させる方法およびこれにより作製された被覆基材
摘要 <p>A coated article includes a pyrolytic applied transparent electrically conductive oxide film of niobium doped titanium oxide. The article can be made by using a coating mixture having a niobium precursor and a titanium precursor. The coating mixture is directed toward a heated substrate to decompose the coating mixture and to deposit a transparent electrically conductive niobium doped titanium oxide film on the surface of the heated substrate. In one embodiment of the invention, the method is practiced using a vaporized coating mixture including a vaporized niobium precursor; a vaporized titanium precursor, and a carrier gas to deposit a niobium doped titanium oxide film having a sheet resistance greater than 1.2 and an index of refraction of 2.3 or greater. The chemical formula for the niobium doped titanium oxide is Nb:TiOX where X is in the range of 1.8-2.1.</p>
申请公布号 JP5662561(B2) 申请公布日期 2015.02.04
申请号 JP20130508009 申请日期 2011.04.15
申请人 发明人
分类号 C03C17/245;C03C17/34;C23C16/40 主分类号 C03C17/245
代理机构 代理人
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