发明名称 |
Mems device mechanism enhancement for robust operation through severe shock and acceleration |
摘要 |
A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event. |
申请公布号 |
EP2833097(A2) |
申请公布日期 |
2015.02.04 |
申请号 |
EP20140177565 |
申请日期 |
2014.07.17 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
HANSON, TIMOTHY J.;WEBER, MARK W.;GLENN, MAX C.;KARNICK, DREW A. |
分类号 |
G01C19/574 |
主分类号 |
G01C19/574 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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