发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device capable of preventing the remarkable deterioration of electrical properties according to refinement. The semiconductor device comprises: a first oxide semiconductor layer on an insulating surface, a second oxide semiconductor layer on the first oxide semiconductor layer, a source electrode and a drain electrode which touch the side of the first oxide semiconductor layer and the second oxide semiconductor layer, a first insulating layer and a second insulating layer on the source electrode and the drain electrode, and a third oxide semiconductor layer on the second oxide semiconductor layer, the source electrode and the drain electrode, a gate insulating layer on the third oxide semiconductor layer, and a gate electrode which touches the upper part of the gate insulating layer and faces the upper side and the lateral side of the second oxide semiconductor layer.
申请公布号 KR20150013031(A) 申请公布日期 2015.02.04
申请号 KR20140091283 申请日期 2014.07.18
申请人 发明人
分类号 H01L21/336;H01L29/786 主分类号 H01L21/336
代理机构 代理人
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