| 摘要 |
<p>Provided are a facing target sputtering apparatus, an organic light emitting display device by using the same, and a manufacturing method thereof. The present invention is provided to enhance a deposition rate of a thin film. According to an embodiment of the present invention, the facing target sputtering apparatus comprises: a chamber equipped with a mounting unit mounting a non-deposition material; a gas supply unit placed to face the mounting unit, supplying gas to the chamber; a first and a second target unit placed inside the chamber to face each other; and a magnetic induction coil arranged to enclose the exterior of the chamber.</p> |
