| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shape measurement sensor for measuring a surface shape of a test object in a shorter time period without damaging the test object. <P>SOLUTION: The shape measurement sensor 1 for measuring a surface shape of the test object 100 includes a probe 11 slidably supported in its axial direction and follows the surface shape of the test object by sliding in the axial direction, a hydrostatic bearing 12 for slidably supporting the probe in the axial direction, and a stopper section 60 for switching the probe between a first state where the probe is positioned and held at a desired intermediate position in the sliding range and a second state where the sliding of the probe is not interfered. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
