| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressure sensor capable of easily changing the shape of an introduction pipe without increasing cost. <P>SOLUTION: A pressure sensor is equipped with a sensor chip 1 in which a thin-film diaphragm part 1a and a detection element for detecting deflection caused by the pressure of the diaphragm part 1a are formed and a package 10 comprising an approximately box-shaped body 11 having one open face for storing the sensor chip 1 and an introduction pipe 12 which is mounted on the body 11 and has an introduction port 12a for introducing fluid whose pressure is to be detected into the body 11. The introduction pipe 12 is provided integrally with a flange part 12b projecting toward the outside in the circumferential direction of its one end. The flange part 12b is formed into a circular shape, is locked to the outer peripheral edge of the top edge of the body 11 to block the opening of the body 11, and is mounted on the body 11 by being sealed with a sealing material 6. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
