| 摘要 |
<p>The present invention relates to a pressure sensor, and the objective of the present invention is to provide a pressure sensor which has a measuring range for a wide range pressure which there is no need to have any elements to form electrodes as well. According to the present invention, the pressure sensor includes: a wafer of a step-up structure which constitutes an upper surface having higher heights toward the top; a deformable wafer of an inverted step-up structure to accommodate the wafer placed on the upper side thereof having a distance from the wafer, and being deformable toward the wafer by an external force; and a protection film placed between the wafer and the deformable wafer keeping a distance, and comprising of an insulator.</p> |
