发明名称 Board for probe card, manufacturing method of the same and probe card
摘要 An embodiment of the present invention is capable of providing a board for a capacitor-embedded probe card, including: a ceramic substrate which includes a first ceramic laminate, and a second ceramic laminate which is arranged on one side of the first ceramic laminate and has a cavity for receiving electronic components; a conductive pattern which is printed on the first ceramic laminate and the second ceramic laminate; a conductive via which is electrically connected to the conducive pattern; and a capacitor arranged in the cavity. The cavity is formed to have a longer depth compared to the thickness of the capacitor, thereby securing a preset space in a lower part after the capacitor is received.
申请公布号 KR20150012994(A) 申请公布日期 2015.02.04
申请号 KR20140027688 申请日期 2014.03.10
申请人 发明人
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
代理机构 代理人
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