| 摘要 |
The method involves providing a substrate comprising a main extension plane, and fastening a seismic mass to the substrate by spring elements. Two compensation electrodes are connected with the substrate. Two compensation forces are produced on the seismic mass by applying quadrature voltages (U40, U50) between the compensation electrode and the seismic mass, respectively. One quadrature voltage (U50) is continuously adjusted based on the other quadrature voltage, where sum of quadratures of the quadrature voltages are constant. |
