发明名称 |
PUMP DEVICE |
摘要 |
[Object] To provide a pump device capable of achieving a further reduction in power consumption. [Solving Means] A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (Õ) of more than 0° and less than 80° with respect to the first piston (21v). |
申请公布号 |
EP2832998(A1) |
申请公布日期 |
2015.02.04 |
申请号 |
EP20130768264 |
申请日期 |
2013.03.07 |
申请人 |
ULVAC KIKO, INC. |
发明人 |
OSAKA, TAISUKE;TANABE, YUSAKU;CHOUNO, MOTOYASU;ITOYAMA, RYUJI |
分类号 |
F04B27/00;F04B35/04;F04B39/00;F04B41/06 |
主分类号 |
F04B27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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