发明名称 PUMP DEVICE
摘要 [Object] To provide a pump device capable of achieving a further reduction in power consumption. [Solving Means] A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (Õ) of more than 0° and less than 80° with respect to the first piston (21v).
申请公布号 EP2832998(A1) 申请公布日期 2015.02.04
申请号 EP20130768264 申请日期 2013.03.07
申请人 ULVAC KIKO, INC. 发明人 OSAKA, TAISUKE;TANABE, YUSAKU;CHOUNO, MOTOYASU;ITOYAMA, RYUJI
分类号 F04B27/00;F04B35/04;F04B39/00;F04B41/06 主分类号 F04B27/00
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