| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating apparatus for applying a liquid resin capable of forming a resin film with a required thickness on a face to be processed of an article to be processed. <P>SOLUTION: A spraying nozzle 52 includes: a liquid resin circulating passage 521 communicating with a liquid resin feeding source 51 and opening a liquid resin outlet 521a on its lower end face; a cylindrical compressed air circulating passage 522 provided by surrounding the liquid resin circulating passage 521 and opening an annular air outlet 522a on its lower end face; and a compressed air introducing passage 523 communicating with the upper end part of the cylindrical compressed air circulating passage 522 and communicated with a compressed air feeding means 54. The cylindrical compressed air circulating passage 522 is formed into a funnel-like shape by contracting its diameter from the upper end to the lower end, and the annular air outlet 522a is provided so as to surround the liquid resin outlet 521a. The compressed air introducing passage 523 is formed in the tangential direction to the wall face of the cylindrical compressed air circulating passage 522, to make the compressed air introduced into the cylindrical compressed air circulating passage 522 circle. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
