发明名称 PROCESS FOR PRODUCING TWO-DIMENSIONAL NANOMATERIALS
摘要 The present invention provides a process for producing a two-dimensional nanomaterial by chemical vapour deposition (CVD), the process comprising contacting a substrate in a reaction chamber with a first flow which contains hydrogen and a second flow which contains a precursor for said material, wherein the contacting takes place under conditions such that the precursor reacts in the chamber to form said material on a surface of the substrate, wherein the ratio of the flow rate of the first flow to the flow rate of the second flow is at least 5:1. Two-dimensional nanomaterials obtainable by said process are also provided, as well as devices comprising said nanomaterials.
申请公布号 EP2831315(A1) 申请公布日期 2015.02.04
申请号 EP20130714993 申请日期 2013.03.28
申请人 ISIS INNOVATION LIMITED 发明人 GROBERT, NICOLE;MURDOCK, ADRIAN TIMOTHY;KOÓS, ANTAL ADOLF
分类号 C30B25/16;B82Y30/00;B82Y40/00;C01B31/04;C23C16/26;C30B25/18;C30B29/02 主分类号 C30B25/16
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