| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ultrasonic sensor capable of reducing the number of electrode wires pulled out from an electrode between ultrasonic transducers. <P>SOLUTION: An ultrasonic sensor 10 includes a plurality of ultrasonic transducers 30 two-dimensionally arranged on a sensor substrate 20. The sensor substrate 20 includes regions Ar1 to Ar4 divided by an X axis L1 and a Y axis L2 crossing each other in the plan view of viewing the sensor substrate in a thickness direction. Then, inside the respective regions Ar1 to Ar4, respective lower electrode wires 334 pulled out from lower electrodes of the respective ultrasonic transducers 30 have a linear portion extending in the direction of separating from a substrate center point O at which the X axis L1 and the Y axis L2 cross each other. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
