| 摘要 |
<p>The present invention relates to a foup transferring apparatus, which couples an upper moving stage to a lower moving stage via a plurality of shafts and transfers motion force of the lower moving stage to the upper moving stage in a distributed state by the shafts, thereby remarkably enhancing durability of the apparatus and at the same time significantly reducing damages to or exchange of the apparatus; reducing an area of an opening part of a fixed stage externally exposed when the upper moving stage moves, thereby significantly preventing damages to and failures of the apparatus caused by inflow of dust; and being configured to engage a belt gear of a power part coupled to the fixed stage for generating power with a gear part coupled to the lower moving stage and formed on one side toward the fixed stage, thereby firmly fixing the lower moving stage and the upper moving stage while being easily designed because of not arranging other special stopper unit.</p> |
