| 摘要 |
<p>According to an embodiment of the present invention, an apparatus for recognizing a wafer mark, which recognizes a mark engraved on each wafer stored in a cassette, comprises: a mark reflection mirror for reflecting a mark engraved on a wafer; an image photographing unit for photographing the mark reflected in the mark reflection mirror; and a robot arm in which the mark reflection mirror and the image photographing unit are installed, and which inserts the mark reflection mirror into a cassette to place the mark reflection mirror near the mark on the wafer.</p> |
