| 摘要 |
<p>The present invention is to provide an electrostatic levitation substrate transfer system which transfers a substrate to each process chamber constituting a cluster by levitating the substrate by static electricity. Especially, a transfer rail is arranged in a radial symmetry along the arrangement of a chamber in order to enter and exit each chamber, and a substrate rotation part is constituted at the center thereof in order for the substrate to be steered, so that chambers are arranged in a radial symmetry due to characteristics of cluster equipment, and the substrate needs to be steered at the center toward a chamber in order for the substrate to be carried. Hence, an electrode for electrostatic levitation, an electrode for electrostatic operation, and an electrode for rotation are formed on a front surface of a chucking plate chucking the substrate; and an electrode for levitation levitating a chucking layer attached with the substrate, an electrode for operation operating the chucking layer, and an electrode for rotation are formed on a surface of the rail installed on the ceiling of the chamber corresponding to the electrodes. Accordingly, the substrate is processed after entering a chamber while being attached to the chucking layer and being levitated as spaced apart from the surface of the rail, and transferred in a method of exiting the chamber and then entering another chamber. According to the present invention, the contamination on the substrate by particles can be greatly reduced as the substrate is transferred while being levitated.</p> |
