| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of handling a plate-shaped workpiece capable of more smoothly lifting the plate-shaped workpiece after cutting. <P>SOLUTION: In the method of handling a plate-shaped workpiece, the plate-shaped workpiece is handled by sucking the plate-shaped workpiece using a plurality of planarly arranged suction pads. In the method of handling a plate-shaped workpiece, the plurality of suction pads are lowered toward the plate-shaped workpiece, and the suction using the suction pads in a first region out of the plurality of suction pads is started. The suction using the suction pads in a second region wider than the first region out of the plurality of suction pads is started on or after the plurality of suction pads reach the plate-shaped workpiece surface, and the plurality of suction pads are raised to lift the plate-shaped workpiece. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
