| 摘要 |
<p>The invention provides a processing apparatus which can automatically correct the deviation between a coordinate registered during correction and an actual coordinate while reducing the situation of low production efficiency, and a processing system and a coordinate correction method. A substrate inspecting/measuring device (10) determines the actual coordinate of a model in a substrate (W) disposed on a conveying stage (13) and registers the determined actual coordinate in a process (Step 114). The substrate inspecting/measuring device (10) conducts inspection/measurement on the model in the substrate (W) disposed on the conveying stage (13) based on the process storing the inspection/measurement coordinate of the model in the substrate (W).</p> |
