| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide means of quickly and accurately determining a solid concentration in a recycled resist not by heating residue method and also to provide means of adjusting the resist viscosity so as to reduce variation of film thickness. <P>SOLUTION: An adjustment method of a used resist is characterized by comprising: a step of reducing, by adding a solvent, the viscosity of a used resist which has been collected to a prescribed viscosity set higher than an intended viscosity; a step of calculating the solid concentration of a diluted resist on the basis of a calibration curve showing a relation between a pre-determined refractive index and a solid concentration; a step of adding water to the diluted resist until the solid concentration becomes a prescribed value; and a step of further adding a solvent until the resist diluted with a solvent and water has intended viscosity and solid concentration, while measuring the refractive index and the viscosity. Also provided is a device thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
