| 摘要 |
<p>A DLC film (121) is formed on a surface of a first shaft (10) by generating cylindrical plasma (3a) in a vacuum deposition chamber (30), supplying material gas into the vacuum deposition chamber (30), and applying pulse voltage to a first shaft (10) as a coated body. A jig (41) that shields a yoke (11) is attached to the yoke (11) as an uncoated part where the DLC film (121) of the first shaft (10) is not formed with separation spacing over a spline fitting part (12) as a coated part where the DLC film (121) is to be formed for preventing decrease of the hardness of the DLC film (121) in the spline fitting part (12).</p> |
