| 摘要 |
The present invention relates to a composition containing dihydropyrazinyl anions capable of obtaining a volatile metallic complex compound for ALD and CVD deposition as being coordinated with a wide variety of metal as six electronic ligands. Moreover, the present invention relates to dihydropyrazine not deprotonated, and which can be coordinated with metal as a stable neutral ligand. According to an embodiment of the present invention, a composition is used for direct liquid injection delivery of a metal dihydropyrazinyl complex precursor of an ALD or CVD fixing chamber to deposit a thin film containing metal such as a ruthenium or cobalt metal film. |
