| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas cluster ion beam device capable of enhancing ionization efficiency while keeping the number of neutral particles composing a gas cluster. <P>SOLUTION: An ionization section where gas cluster ions are generated from a gas cluster is arranged on an extension which connects a nozzle ejecting a gas cluster and a skimmer producing a beam of a gas cluster ejected from the nozzle. The ionization section comprises an electron extraction electrode having a filament generating thermions, and an electron acceleration electrode which accelerates thermions thus extracted. The electron acceleration electrode and the electron extraction electrode are arranged sequentially from the skimmer side. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
