| 摘要 |
<p>Provided is a transfer arm comprising: a support hand supporting a substrate; an arm base combined to a lifting unit to be able to vertically move, wherein the lifting unit moves the support hand upward and downward,; an arm body combined with one side spaced apart from the other side where the arm base is combined with the lifting unit; an arm unit combine with the arm body to be able to move between the forward direction, in which the support hand protrudes from the arm body, and the backward direction opposite to the forward direction; and a first support member combined to the arm base to protrude from the arm base in the forward direction in order to support the arm body, in case the support hand moves in the forward direction. According to the present invention, the substrate transfer device comprises: a transfer arm; a lifting unit lifting the transfer arm to change the level of the transfer arm; a rotational unit rotating the lifting unit to change the direction with which the transfer arm is faced; and a moving unit moving the rotational unit in the travelling direction. The substrate transfer device is capable of preventing damage to a substrate and a cassette due to the transfer arm colliding with the substrate and the cassette by preventing the transfer arm from being tilted toward the lower side, and the support hand from being tilted.</p> |
