发明名称 プロフィロメータ機能付きの走査型超音波顕微鏡
摘要 A scanning acoustic microscope, includes an ultrasonic transducer, a data storage memory, a display, a scanner assembly, and a controller. The controller is adapted to cause the motor to move the transducer along a path with respect to a sample, and cause the ultrasonic transducer to emit a pulse of acoustic energy towards the sample at each point in a plurality of points along the path. In addition, the controller is adapted to cause the ultrasonic transducer to receive a set of reflection signals that correspond to each of the pulses emitted therefrom. The sets of reflection signals are used to generate an image of a profile of the sample and an image representative of acoustic impedance features in the interior of the sample. The image of the profile of the sample shows a variation in height across a surface of the sample.
申请公布号 JP5663132(B2) 申请公布日期 2015.02.04
申请号 JP20080263547 申请日期 2008.10.10
申请人 ソノスキャン,インコーポレイテッド 发明人 ローレンス ダブリュー. ケスラー;マイケル ジー. オラベクス;ジキ グオ
分类号 G01N29/06;G01N29/09;G01N29/26 主分类号 G01N29/06
代理机构 代理人
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