| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a system for introducing a process fluid into a processing system through a chamber component. <P>SOLUTION: The chamber component has a chamber element, and the chamber element has a first surface on a supply side thereof and a second surface on a processing side thereof. The processing side is opposite to the supply side. Further, the chamber component has a flow channel extending through the chamber element from the supply side to the processing side, and the flow channel has an inflow port formed to receive the process fluid and an outflow port formed to deliver the process fluid. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
