Magnetic device with different planarization areas

摘要

A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.

主权项

1. A magnetic device comprising:
adjacent first and second areas in the magnetic device; a magnetic layer comprising:
a first set of trenches in the first area with each trench of the first set of trenches having a first size; anda second set of trenches in the second area with each trench of the second set of trenches having a second size; a filler material layer over the magnetic layer, wherein an upper surface of the filler material layer is substantially planar in the first area and comprises recesses corresponding to the second set of trenches in the second area; and temporary layer means over the filler material layer in the first area and in the recesses in the second area for enabling different planarization processing of the filler material layer in the first area and in the second area.