| 主权项 |
1. A method of forming capacitors, comprising:
forming dielectric material elevationally over node locations; forming support material comprising polysilicon elevationally over the dielectric material; forming covering material elevationally over the polysilicon-comprising support material; forming individual openings through the covering, support, and dielectric materials to the node locations; forming a first capacitor electrode within individual of the openings in conductive electrical connection with the respective node locations; after forming the first capacitor electrode within the individual openings, conducting an anisotropic etching step to anisotropically etch openings though the covering material to expose the polysilicon-comprising support material; first isotropically etching only partially into the support material using a liquid etching fluid to expose an elevationally outer portion of sidewalls of individual of the first capacitor electrodes, no additional etching step occurring between said anisotropic etching step and said first isotropic etching using the liquid etching fluid; after the first isotropic etching, second isotropically etching into the polysilicon-comprising support material using a dry etching fluid to expose an elevationally inner portion of the sidewalls of the individual first capacitor electrodes and to stop on the dielectric material; and forming a capacitor dielectric over the outer and inner portions of the sidewalls of the first capacitor electrodes and forming a second capacitor electrode over the capacitor dielectric. |
