Merged FinFETs and method of manufacturing the same

摘要

FinFETs are merged together by a metal. The method of manufacturing the FinFETs include forming a plurality of fin bodies on a substrate and merging the fin bodies with a metal. The method further includes implanting source and drain regions through the metal.

主权项

1. A method comprising:
forming a plurality of fin bodies on a substrate; forming a gate structure over the plurality of fin bodies; depositing a layer of metal on the fin bodies; annealing the layer of metal to form silicide; merging the fin bodies with a metal by depositing the metal on the plurality of fin bodies and the gate structure, wherein the metal is in electrical contact with the gate structure; and implanting source and drain regions through the metal, wherein the annealing is performed prior to the merging.