Integration of a titania layer in an anti-reflective coating

摘要

A stack of a first anti-reflective coating (ARC) layer and a titanium layer is formed on a front surface of a semiconductor substrate including a p-n junction, and is subsequently patterned so that a semiconductor surface is physically exposed in metal contact regions of the front surface of the semiconductor substrate. The remaining portion of the titanium layer is converted into a titania layer by oxidation. A metal layer is plated on the metal contact regions, and a copper line is subsequently plated on the metal layer or a metal semiconductor alloy derived from the metal layer. A second ARC layer is deposited over the titania layer and the copper line, and is subsequently patterned to provide electrical contact to the copper line.

主权项

1. An anti-reflective coating (ARC) structure comprising:
a semiconductor substrate having a first region and an adjacent second region; a first dielectric material layer located continuously on a topmost surface of said first region of said semiconductor substrate, but not said second region of said semiconductor substrate; a titania layer located continuously on a topmost surface of said first dielectric material layer, but not said second region of said semiconductor substrate; a first metallic portion located directly on a topmost surface of said second region of said semiconductor substrate, but not said titania layer; a second metallic material having a first portion in direct physical contact with a topmost surface of said first metallic portion and a second portion that is in direct physical contact with a topmost surface of said titania layer; and a second dielectric material layer that is in direct physical contact with an exposed portion of said titania layer and that is in direct physical contact with at least an outer surface portion of said second metallic material portion, wherein said first dielectric material layer, said titania layer, and said second dielectric material layer collectively constitute an anti-reflective coating layer.