| 摘要 |
<p>The present invention relates to a method of planarizing a nano-concavo-convex surface again before an OLED light emitting layer is stacked on a transparent substrate having a nanostructure to improve light extraction efficiency like an OLED lighting substrate. In the present invention, a spray injects liquid onto a nano-concavo-convex part such that a planarization layer is formed on a nanostructure. To prevent liquid volatilization due to spray, a substrate is placed in a chamber under an isothermal-isohumidity environment. To uniformly distribute liquid spray onto a large-sized substrate, an ultrasonic wave generator is installed to a substrate stage to provide vibration. Also, a UV ray is irradiated to a substrate before the liquid spray to change a substrate surface into a hydrophile surface; thereby improving the planarization level of a planarization layer.</p> |
