Stiction reduction for MEMS devices

摘要

A capacitive micro-electromechanical switch (MEMS) integrated circuit (IC) comprises a plurality of capacitors, each having a voltage terminal for applying an actuation voltage to the individual capacitor, wherein each capacitor is capable of being individually cycled. The MEMS IC further includes: a high voltage driver having a voltage distribution mechanism that couples to the voltage terminal of each of the plurality of capacitors to enable the high voltage driver to selectively provide a pre-determined voltage input required to actuate and charge a selected one or more of the plurality of capacitors; and control logic communicatively coupled to the high voltage driver and which deterministically applies power cycle times (less than a stiction limit) for an actuation and de-actuation of at least a first capacitor of the plurality of capacitors to substantially reduce an occurrence of stiction within at least the first capacitor during operation of the MEMS device.

主权项

1. A method for reducing stiction and extending an effective life of capacitors within a micro-electromechanical Switch (MEMs) device containing a plurality of capacitors, the method comprising:
controlling, via a programmable controller, an actuation and de-actuation cycle time for at least a first capacitor among the plurality of capacitors in order to substantially reduce an occurrence of stiction within at least the first capacitor, wherein said controlling includes:
actuating the first capacitor to provide a corresponding first capacitance;concurrently with the actuating of the first capacitor, initiating a timing mechanism to track an elapsed time for which the first capacitor remains in an actuated state;comparing the elapsed time for which the first capacitor remains in the actuated state to a pre-established stiction avoidance threshold time for the first capacitor, wherein the pre-established stiction avoidance threshold time is less than a time required for stiction to occur within the first capacitor; andin response to the elapse time reaching the pre-established stiction avoidance threshold time, de-actuating the first capacitor.