MEMS microphone

摘要

A MEMS microphone. The MEMS microphone includes a substrate, a transducer support that includes or supports a transducer, a housing, and an acoustic channel. The transducer support resides on the substrate. The housing surrounds the transducer support and includes an acoustic aperture. The acoustic channel couples the acoustic aperture to the transducer, and isolates the transducer from an interior area of the MEMS microphone.

主权项

1. A set of frequency response matched MEMS microphones, comprising:
a first MEMS microphone including
a first substrate,a first transducer support including a first transducer, residing on the first substrate,a first housing surrounding the first transducer support and including a first acoustic aperture, anda first acoustic channel coupling the first acoustic aperture to the first transducer, the first acoustic channel isolating an external side of the first transducer from an internal area of the first MEMS microphone; and a second MEMS microphone including
a second substrate including a second acoustic aperture,a second transducer support including a second transducer, residing on the second substrate,a second housing surrounding the second transducer support, anda second acoustic channel coupling the second acoustic aperture to the second transducer, the second acoustic channel isolating an external side of the second transducer from an internal area of the second MEMS microphone; wherein a volume of an area between the first acoustic aperture and the first transducer is substantially equal to a volume of an area between the second acoustic aperture and the second transducer; and wherein an internal side of the first transducer is exposed to an interior of the first housing and an internal side of the second transducer is exposed to an interior of the second housing.