| 摘要 |
<p>Provided are a substrate processing apparatus, etc. which may change operation of a substrate transferring mechanism according to substrate processing time. In the substrate processing apparatus (1), a substrate processing part (14) has a plurality of processing modules (2) processing a substrate (W) and the substrate transferring mechanism, etc. are installed between a mounting part (11) and the processing modules (2). A parameter memorizing part (3) memorizes a plurality of groups of setup values of operational speed of the substrate transferring mechanism (121), etc. and transferring parameters (33) matched with the number of processed sheets of the substrate (W) per unit time, and a parameter selection part (4) compares the number of processed sheets of the substrate per unit time determined according to a recipe (31) in accordance with the process of the substrate (W) with the number of processed sheets corresponding to the transferring parameter, and selects the transferring parameter corresponding to the minimum number of processed sheets among the number equal to or greater than the number of processed sheets determined according to the recipe (31). Transferring controllers (151 - 153) control the substrate transferring mechanism (121), etc. based on the setup value of the selected transferring parameter.</p> |
