Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system

摘要

Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.

主权项

1. An actuator, which is formed in a substrate including a handle layer, an elastic body layer, and an insulating layer sandwiched between the handle layer and the elastic body layer, the actuator comprising:
a support portion; a movable portion supported to the support portion by an elastic body; a movable comb electrode formed on the movable portion; a fixed comb electrode supported by the support portion; and electrode wirings connected separately to the movable comb electrode and the fixed comb electrode, wherein the elastic body supports the movable portion in such a manner that the movable portion is displaceable in a direction perpendicular to a surface of the substrate in accordance with voltages applied to the movable comb electrode and the fixed comb electrode, wherein the movable comb electrode, the fixed comb electrode, and the support portion are each made up of the handle layer, and the elastic body is made up of the elastic body layer, wherein the handle layer is provided with a handle layer separation groove for electrically separating the handle layer of the movable comb electrode from the handle layer of the support portion supporting the fixed comb electrode, and wherein the actuator further comprises a structure reinforcing portion having an insulating property and provided across the handle layer separation groove.