发明名称 LIGHT IRRADIATION APPARATUS
摘要 <p>The present invention discloses an ultraviolet irradiation device (10) which ultraviolizes a shone thing while taking a semiconductor chip (W) stuck with a ultraviolet constrictive type adhesive film (S), and the invention can move on a casing (14) when set collected in a sliding mechanism (15); the casing (14) is provided with a ultraviolet irradiation unit (11), and the adhesive film (S) is ultraviolized as irradiated surface when the sliding mechanism (15) moves in the direction bestrides an irradiation port (12) of the casing (14); the casing (14) is provided with a switch mechanism (17) which follows movement of the sliding mechanism (15) to open an irradiation port (12).</p>
申请公布号 KR101489374(B1) 申请公布日期 2015.02.03
申请号 KR20090039776 申请日期 2009.05.07
申请人 发明人
分类号 H01L21/027;H01L21/301 主分类号 H01L21/027
代理机构 代理人
主权项
地址