发明名称 Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
摘要 The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.
申请公布号 US8946683(B2) 申请公布日期 2015.02.03
申请号 US200912996924 申请日期 2009.06.16
申请人 The Board of Trustees of the University of Illinois;Purdue Research Foundation 发明人 Rogers John A.;Cao Qing;Alam Muhammad;Pimparkar Ninad
分类号 H01L51/05;H01L51/00;B82Y10/00 主分类号 H01L51/05
代理机构 Lathrop & Gage LLP 代理人 Lathrop & Gage LLP
主权项 1. An electronic device comprising: a first electrode; a second electrode; and a patterned layer comprising randomly oriented or partially aligned carbon nanotubes provided in one or more interconnected carbon nanotube networks positioned between and in electrical contact with said first electrode and said second electrode, wherein said partially aligned carbon nanotubes are aligned relative to each other with deviations from absolute parallelism that are greater than 20 degrees; said one or more interconnected carbon nanotube networks characterized by a plurality of nanotube intersections; said patterned layer having a thickness less than or equal to 10 nanometers and having one or more void regions without carbon nanotubes; wherein said void regions comprise one or more cavities in said patterned layer extending entirely from said first electrode to said second electrode, thereby defining a plurality of strips of said interconnected carbon nanotube networks, wherein said one or more void regions provided between said first and second electrodes reduces by at least 50% the number of purely metallic conductive pathways from said first electrode and second electrode in said one or more interconnected carbon nanotube networks relative to a corresponding layer of randomly oriented or partially aligned carbon nanotubes provided in another one or more interconnected carbon nanotube networks and not having said void regions.
地址 Urbana IL US